P

Inventor

MARTINEZ LINNELL

US32 patents
⚠️ This page may combine multiple inventors who share the name “MARTINEZ LINNELL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PLASMA THERM LLC

21 patents
US8785332B2Jul 22, 2014

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC15 citations92
US8691702B2Apr 8, 2014

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC13 citations83
US9070760B2Jun 30, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC3 citations74
US9911654B2Mar 6, 2018

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC1 citations63
US9105705B2Aug 11, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC1 citations63
US8980764B2Mar 17, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC1 citations63
US8796154B2Aug 5, 2014

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC2 citations63
US12489018B2Dec 2, 2025

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations62
US11747494B2Sep 5, 2023

Ion filter using aperture plate with plurality of zones

PLASMA THERM LLC1 citations62
US11488865B2Nov 1, 2022

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations62
US9343365B2May 17, 2016

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC2 citations61
US9082839B2Jul 14, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC3 citations58
US10573557B2Feb 25, 2020

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations52
US10297427B2May 21, 2019

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations52
US9202720B2Dec 1, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations52
US10707060B2Jul 7, 2020

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations51
US9202721B2Dec 1, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations51
US8946058B2Feb 3, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations51
US10497621B2Dec 3, 2019

Method for dicing a substrate with back metal

PLASMA THERM LLC0 citations48
US9368404B2Jun 14, 2016

Method for dicing a substrate with back metal

PLASMA THERM LLC0 citations48
US9202737B2Dec 1, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations48

PLASMA-THERM LLC

5 patents

JOHNSON CHRIS

2 patents

MKS INSTR INC

2 patents

MKS INC

2 patents