Inventor
PAYS-VOLARD DAVID
US27 patents
⚠️ This page may combine multiple inventors who share the name “PAYS-VOLARD DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PLASMA THERM LLC
20 patentsUS8785332B2Jul 22, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC15 citations92
US8691702B2Apr 8, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC13 citations83
US9070760B2Jun 30, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations74
US9911654B2Mar 6, 2018
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations63
US9105705B2Aug 11, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations63
US8980764B2Mar 17, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations63
US8796154B2Aug 5, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC2 citations63
US12489018B2Dec 2, 2025
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations62
US11488865B2Nov 1, 2022
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations62
US9343365B2May 17, 2016
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC2 citations61
US9082839B2Jul 14, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations58
US10573557B2Feb 25, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations52
US10297427B2May 21, 2019
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations52
US9202720B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations52
US10707060B2Jul 7, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US9202721B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US8946058B2Feb 3, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US10497621B2Dec 3, 2019
Method for dicing a substrate with back metal
PLASMA THERM LLC0 citations48
US9368404B2Jun 14, 2016
Method for dicing a substrate with back metal
PLASMA THERM LLC0 citations48
US9202737B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations48
PLASMA-THERM LLC
5 patentsUS9711406B2Jul 18, 2017
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC6 citations84
US9564366B2Feb 7, 2017
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC1 citations63
US10741447B2Aug 11, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC0 citations52
US9496177B2Nov 15, 2016
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC0 citations52
USRE46339EMar 14, 2017
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC0 citations51