Inventor
HARRIS RICHARD D
31 patents
⚠️ This page may combine multiple inventors who share the name “HARRIS RICHARD D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ROCKWELL AUTOMATION TECH INC
20 patentsUS6664786B2Dec 16, 2003
Magnetic field sensor using microelectromechanical system
ROCKWELL AUTOMATION TECH INC78 citations98
US6617750B2Sep 9, 2003
Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
ROCKWELL AUTOMATION TECH INC83 citations97
US6593870B2Jul 15, 2003
MEMS-based electrically isolated analog-to-digital converter
ROCKWELL AUTOMATION TECH INC97 citations97
US6583374B2Jun 24, 2003
Microelectromechanical system (MEMS) digital electrical isolator
ROCKWELL AUTOMATION TECH INC103 citations97
US6690178B2Feb 10, 2004
On-board microelectromechanical system (MEMS) sensing device for power semiconductors
ROCKWELL AUTOMATION TECH INC31 citations93
US6975193B2Dec 13, 2005
Microelectromechanical isolating circuit
ROCKWELL AUTOMATION TECH INC49 citations92
US6768628B2Jul 27, 2004
Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap
ROCKWELL AUTOMATION TECH INC51 citations92
US6761829B2Jul 13, 2004
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
ROCKWELL AUTOMATION TECH INC23 citations92
US6803755B2Oct 12, 2004
Microelectromechanical system (MEMS) with improved beam suspension
ROCKWELL AUTOMATION TECH INC28 citations91
US6794271B2Sep 21, 2004
Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge
ROCKWELL AUTOMATION TECH INC13 citations84
US6756310B2Jun 29, 2004
Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques
ROCKWELL AUTOMATION TECH INC14 citations84
US7093498B2Aug 22, 2006
Microelectromechanical strain gauge with frequency detector
ROCKWELL AUTOMATION TECH INC17 citations83
US6798312B1Sep 28, 2004
Microelectromechanical system (MEMS) analog electrical isolator
ROCKWELL AUTOMATION TECH INC9 citations73
US6569701B2May 27, 2003
Method for fabricating an isolated microelectromechanical system device
ROCKWELL AUTOMATION TECH INC11 citations73
US6846724B2Jan 25, 2005
Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge
ROCKWELL AUTOMATION TECH INC4 citations63
US6815243B2Nov 9, 2004
Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
ROCKWELL AUTOMATION TECH INC6 citations62
US7049806B2May 23, 2006
Microelectricalmechanical system with improved beam suspension
ROCKWELL AUTOMATION TECH INC3 citations61
US7387737B2Jun 17, 2008
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
ROCKWELL AUTOMATION TECH INC0 citations52
US7018550B2Mar 28, 2006
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
ROCKWELL AUTOMATION TECH INC0 citations52
US7262522B2Aug 28, 2007
Microelectromechanical isolating power converter
ROCKWELL AUTOMATION TECH INC1 citations51