Inventor
AIKO KENJI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “AIKO KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
16 patentsUS7535561B2May 19, 2009
Defect inspecting apparatus
HITACHI HIGH TECH CORP14 citations92
US7672799B2Mar 2, 2010
Defect inspection apparatus and defect inspection method
HITACHI HIGH TECH CORP11 citations83
US11079275B2Aug 3, 2021
Far-infrared spectroscopy device
HITACHI HIGH TECH CORP4 citations71
US10948347B2Mar 16, 2021
Far-infrared spectroscopy device
HITACHI HIGH TECH CORP1 citations71
US11016023B1May 25, 2021
Far-infrared spectroscopic device and far-infrared spectroscopic method
HITACHI HIGH TECH CORP2 citations70
US8804109B2Aug 12, 2014
Defect inspection system
HITACHI HIGH TECH CORP2 citations62
US7847927B2Dec 7, 2010
Defect inspection method and defect inspection apparatus
HITACHI HIGH TECH CORP2 citations62
US7733475B2Jun 8, 2010
Defect inspecting apparatus
HITACHI HIGH TECH CORP3 citations62
US7733474B2Jun 8, 2010
Defect inspection system
HITACHI HIGH TECH CORP3 citations62
US11320309B2May 3, 2022
Far-infrared spectroscopy device
HITACHI HIGH TECH CORP0 citations61
US7953567B2May 31, 2011
Defect inspection apparatus and defect inspection method
HITACHI HIGH TECH CORP2 citations61
US12196670B2Jan 14, 2025
Far-infrared spectroscopy device
HITACHI HIGH TECH CORP0 citations56
US10113959B2Oct 30, 2018
Terahertz wave generating device and spectroscopic device using same
HITACHI HIGH TECH CORP1 citations52
US11977026B2May 7, 2024
Far-infrared spectroscopy device and far-infrared spectroscopy method
HITACHI HIGH TECH CORP0 citations49
US11644418B2May 9, 2023
Far-infrared light source and far-infrared spectrometer
HITACHI HIGH TECH CORP0 citations49
US12535412B2Jan 27, 2026
Far-infrared spectroscopy device and sample adapter
HITACHI HIGH TECH CORP0 citations46