Inventor

KORENAGA NOBUSHIGE

JP57 patents

⚠️ This page may combine multiple inventors who share the name “KORENAGA NOBUSHIGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KORENAGA NOBUSHIGE

CANON KK

Alignment apparatus and exposure apparatus using the same

Linear motor coil for exposure apparatus

Scanning exposure apparatus and device manufacturing method using the same

Linear motor mechanism for exposure apparatus, and device manufacturing method using the same

Stage device and pattern transfer system using the same

Stage system and stage driving method for use in exposure apparatus

Stage apparatus, and exposure apparatus and device manufacturing method using the same

Stage device and exposure apparatus using the same

Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus

Stage device, exposure apparatus using the same, and device production method

Support device

Alignment apparatus and exposure apparatus using the same

Alignment apparatus and exposure apparatus using the same

Aligning apparatus, exposure apparatus, and device manufacturing method

Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus

Supporting system in exposure apparatus

Moving stage device in exposure apparatus

Stage apparatus and method of driving the same

Linear motor, stage apparatus, and exposure apparatus

Moving-magnet linear motor, aligner and apparatus provided therewith, and method for manufacturing devices using the same

Supporting system in exposure apparatus

Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stage

Stage apparatus, exposure apparatus using the same, and a device manufacturing method

Stage mechanism for exposure apparatus

Substrate, and method and apparatus for holding the substrate

Movable stage mechanism and exposure apparatus using the same

Linear motor, moving stage system, exposure apparatus, and device manufacturing method

Stage system and exposure apparatus, and device manufacturing method using the same

Stage system and exposure apparatus using the same

Driving apparatus, exposure apparatus, and device manufacturing method

Anti-vibration technique

Stage system, exposure apparatus, and device manufacturing method

Positioning apparatus, charged-particle-beam exposure apparatus, and device manufacturing method

Stage system

Exposure apparatus and device manufacturing method

Stage apparatus, exposure apparatus, and device manufacturing method

Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device

Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device

Stage apparatus and method of controlling the same

Stage device and exposure apparatus using the same

X-ray mask and semiconductor device manufacturing method using the same

Positioning apparatus, lithography apparatus, and method of manufacturing article

Radiation gauge

Guide apparatus, exposure apparatus, and method of manufacturing article

Processing apparatus and article manufacturing method using same

Lithography apparatus, and method of manufacturing article

Aligning apparatus including an attraction preventing plate provided between permanent magnet and magnetic member

Linear motor, moving stage system, exposure apparatus, and device manufacturing method

ITO HIROHITO

Imprint apparatus and method for producing article

MAEHARA YUJI

Exposure apparatus and article manufacturing method