Inventor
MUGURUMA TERUMI
JP6 patents
Patents
6 patentsUS6123120ASep 26, 2000
Clean storage equipment for substrates and method of storing substrates
TOSHIBA KK99 citations96
US6883539B2Apr 26, 2005
Wafer container
TOSHIBA KK43 citations94
US6267123B1Jul 31, 2001
Pod and method of cleaning it
TOSHIBA KK46 citations94
US6926029B2Aug 9, 2005
Wafer container
TOSHIBA KK27 citations91
US5294292AMar 15, 1994
Plasma ashing method
TOSHIBA KK28 citations90
US6422247B2Jul 23, 2002
Pod and method of cleaning it
TOSHIBA KK10 citations72