Inventor
KAWAMURA KATSUNORI
JP7 patents
Patents
7 patentsUS6858760B2Feb 22, 2005
Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method
CENTRAL GLASS CO LTD26 citations92
US5795654AAug 18, 1998
Adhesive for bonding together polyvinylidene fluoride resin and substrate
CENTRAL GLASS CO LTD8 citations71
US7067691B2Jun 27, 2006
Process for producing α-substituted acrylic acid esters
CENTRAL GLASS CO LTD5 citations60
US7781602B2Aug 24, 2010
Fluorinated cyclic compound, polymerizable fluoromonomer, fluoropolymer, resist material comprising the same, and method of forming pattern with the same
CENTRAL GLASS CO LTD0 citations51
US7399815B2Jul 15, 2008
Fluorine-containing allyl ether compounds, their copolymers, and resist compositions and anti-reflection film materials using such copolymers
CENTRAL GLASS CO LTD0 citations51
US7109383B2Sep 19, 2006
Fluorine-containing allyl ether compounds, their copolymers, and resist compositions and anti-reflection film materials using such copolymers
CENTRAL GLASS CO LTD1 citations51
US6992210B2Jan 31, 2006
Fluorine-containing cyclic esters, fluorine-containing cyclic alcohols, and their production processes
CENTRAL GLASS CO LTD0 citations51