Inventor
CHAPMAN ROBERT A
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHAPMAN ROBERT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS5536330AJul 16, 1996
Method of purging and pumping vacuum chamber to ultra-high vacuum
APPLIED MATERIALS INC57 citations95
US5759287AJun 2, 1998
Method of purging and passivating a semiconductor processing chamber
APPLIED MATERIALS INC33 citations92
US5830808ANov 3, 1998
Plasma reactor with magnet for protecting an electroacoustic chuck from the plasma
APPLIED MATERIALS INC18 citations91