Inventor
RANA VIRENDRA V S
US29 patents
⚠️ This page may combine multiple inventors who share the name “RANA VIRENDRA V S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS6374770B1Apr 23, 2002
Apparatus for improving film stability of halogen-doped silicon oxide films
APPLIED MATERIALS INC184 citations98
US6191026B1Feb 20, 2001
Method for submicron gap filling on a semiconductor substrate
APPLIED MATERIALS INC155 citations98
US6190233B1Feb 20, 2001
Method and apparatus for improving gap-fill capability using chemical and physical etchbacks
APPLIED MATERIALS INC277 citations98
US5990000ANov 23, 1999
Method and apparatus for improving gap-fill capability using chemical and physical etchbacks
APPLIED MATERIALS INC270 citations97
US6103601AAug 15, 2000
Method and apparatus for improving film stability of halogen-doped silicon oxide films
APPLIED MATERIALS INC64 citations96
US5421401AJun 6, 1995
Compound clamp ring for semiconductor wafers
APPLIED MATERIALS INC69 citations96
US5292554AMar 8, 1994
Deposition apparatus using a perforated pumping plate
APPLIED MATERIALS INC81 citations96
US5827785AOct 27, 1998
Method for improving film stability of fluorosilicate glass films
APPLIED MATERIALS INC56 citations94
US7749917B1Jul 6, 2010
Dry cleaning of silicon surface for solar cell applications
APPLIED MATERIALS INC15 citations92
US5944899AAug 31, 1999
Inductively coupled plasma processing chamber
APPLIED MATERIALS INC27 citations92
US6291028B1Sep 18, 2001
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface
APPLIED MATERIALS INC8 citations73
US6289843B1Sep 18, 2001
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface
APPLIED MATERIALS INC7 citations73
US6121163ASep 19, 2000
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface
APPLIED MATERIALS INC10 citations73
US8372753B2Feb 12, 2013
Dry cleaning of silicon surface for solar cell applications
APPLIED MATERIALS INC4 citations63
AT & T BELL LAB
8 patentsUS5141897AAug 25, 1992
Method of making integrated circuit interconnection
AT & T BELL LAB55 citations95
US5227335AJul 13, 1993
Tungsten metallization
AT & T BELL LAB30 citations86
US4985371AJan 15, 1991
Process for making integrated-circuit device metallization
AT & T BELL LAB21 citations82
US5328872AJul 12, 1994
Method of integrated circuit manufacturing using deposited oxide
AT & T BELL LAB9 citations72
US5135886AAug 4, 1992
Integrated circuit fabrication utilizing amorphous layers
AT & T BELL LAB5 citations62
US5084415AJan 28, 1992
Metallization processing
AT & T BELL LAB6 citations62
US4544438AOct 1, 1985
Liquid phase epitaxial growth of bismuth-containing garnet films
AT & T BELL LAB5 citations61
US4468438AAug 28, 1984
Garnet epitaxial films with high Curie temperatures
AT & T BELL LAB3 citations61