Inventor
VERMA AMRITA
US7 patents
Patents
7 patentsUS6374770B1Apr 23, 2002
Apparatus for improving film stability of halogen-doped silicon oxide films
APPLIED MATERIALS INC184 citations98
US6103601AAug 15, 2000
Method and apparatus for improving film stability of halogen-doped silicon oxide films
APPLIED MATERIALS INC64 citations96
US5763010AJun 9, 1998
Thermal post-deposition treatment of halogen-doped films to improve film stability and reduce halogen migration to interconnect layers
APPLIED MATERIALS INC61 citations95
US6079354AJun 27, 2000
Thermal post-deposition treatment of halogen-doped films to improve film stability and reduce halogen migration to interconnect layers
APPLIED MATERIALS INC20 citations92
US6289843B1Sep 18, 2001
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface
APPLIED MATERIALS INC7 citations73
US6291028B1Sep 18, 2001
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface
APPLIED MATERIALS INC8 citations73
US6121163ASep 19, 2000
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface
APPLIED MATERIALS INC10 citations73