Inventor

FUJINO NAOHIKO

JP17 patents

⚠️ This page may combine multiple inventors who share the name “FUJINO NAOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJINO NAOHIKO

MITSUBISHI ELECTRIC CORP

Optical scanning system utilizing an atomic force microscope and an optical microscope

Method of detecting the position and the content of fine foreign matter on substrates and analyzers used therefor

Thin film forming apparatus using laser

Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these

Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same

Semiconductor cleaning apparatus and wafer cassette

Semiconductor cleaning apparatus and wafer cassette

Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof

Apparatus for recovering impurities from a silicon wafer

Particle detecting method and system for detecting minute particles on a workpiece

Semiconductor cleaning apparatus and wafer cassette

Semiconductor cleaning apparatus and wafer cassette

SEIKO INSTR INC

Surface analyzing apparatus

Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same

Method for analyzing minute foreign substance elements

Surface analyzing apparatus with anti-vibration table

Surface analyzing apparatus