Inventor
LEE YIL-HYUNG
KR8 patents
⚠️ This page may combine multiple inventors who share the name “LEE YIL-HYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS9905754B1Feb 27, 2018
Method of forming patterns and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD20 citations92
US10608173B2Mar 31, 2020
Ion beam apparatus with continuously changing parameter control
SAMSUNG ELECTRONICS CO LTD1 citations60
US10361078B2Jul 23, 2019
Method of forming fine patterns of a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations51
US10410839B2Sep 10, 2019
Method of processing a substrate using an ion beam and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD0 citations40