P

Inventor

LIU KUO-SHIH

US6 patents
⚠️ This page may combine multiple inventors who share the name “LIU KUO-SHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents
US11175590B2Nov 16, 2021

Low dose charged particle metrology system

ASML NETHERLANDS BV2 citations72
US11430631B2Aug 30, 2022

Methods of inspecting samples with multiple beams of charged particles

ASML NETHERLANDS BV0 citations62
US11720030B2Aug 8, 2023

Low dose charged particle metrology system

ASML NETHERLANDS BV0 citations61

APPLIED MATERIALS INC

2 patents
US6553932B2Apr 29, 2003

Reduction of plasma edge effect on plasma enhanced CVD processes

APPLIED MATERIALS INC51 citations93
US6170430B1Jan 9, 2001

Gas feedthrough with electrostatic discharge characteristic

APPLIED MATERIALS INC4 citations55

LIU KUO-SHIH

1 patent
US8582079B2Nov 12, 2013

Using phase difference of interference lithography for resolution enhancement

LIU KUO-SHIH3 citations51