Inventor
SILVETTI MARIO DAVE
US5 patents
⚠️ This page may combine multiple inventors who share the name “SILVETTI MARIO DAVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6413321B1Jul 2, 2002
Method and apparatus for reducing particle contamination on wafer backside during CVD process
APPLIED MATERIALS INC679 citations95
US6553932B2Apr 29, 2003
Reduction of plasma edge effect on plasma enhanced CVD processes
APPLIED MATERIALS INC51 citations93
US7332262B2Feb 19, 2008
Photolithography scheme using a silicon containing resist
APPLIED MATERIALS INC23 citations91
US6967072B2Nov 22, 2005
Photolithography scheme using a silicon containing resist
APPLIED MATERIALS INC41 citations91