P

Inventor

WIHL MARK JOSEPH

US4 patents
⚠️ This page may combine multiple inventors who share the name “WIHL MARK JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents
US6363166B1Mar 26, 2002

Automated photomask inspection apparatus

KLA TENCOR CORP94 citations97
US6052478AApr 18, 2000

Automated photomask inspection apparatus

KLA TENCOR CORP166 citations97
US6584218B2Jun 24, 2003

Automated photomask inspection apparatus

KLA TENCOR CORP8 citations72

KLA TENCOR TECH CORP

1 patent
US6674522B2Jan 6, 2004

Efficient phase defect detection system and method

KLA TENCOR TECH CORP31 citations91