Inventor

KVAMME DAMON FLOYD

US3 patents

Patents

3 patents

US6363166B1Mar 26, 2002

Automated photomask inspection apparatus

KLA TENCOR CORP94 citations97

US6052478AApr 18, 2000

Automated photomask inspection apparatus

KLA TENCOR CORP166 citations97

US6584218B2Jun 24, 2003

Automated photomask inspection apparatus

KLA TENCOR CORP8 citations72