Inventor

NAGARAJAN RANGANATHAN

SG21 patents

⚠️ This page may combine multiple inventors who share the name “NAGARAJAN RANGANATHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAGARAJAN RANGANATHAN

INST OF MICROELECTRONICS

Wafer-level package for micro-electro-mechanical systems

Apparatus and method for fluid-based cooling of heat-generating devices

Lateral polysilicon beam process

Low temperature resist trimming process

High aspect ratio trench isolation process for surface micromachined sensors and actuators

Z-axis accelerometer

Z-axis accelerometer

Process for device using partial SOI

Method of fabricating micro-mirror switching device

AGENCY SCIENCE TECH & RES

Method of stacking thin substrates by transfer bonding

RF and MMIC stackable micro-modules

Fully salicided (FUSA) MOSFET structure

Method of forming through-wafer interconnects for vertical wafer level packaging

Wafer-level inter-connector formation method

Layer arrangement and a wafer level package comprising the layer arrangement

RF and MMIC stackable micro-modules

Method of forming through-wafer interconnects for vertical wafer level packaging

VANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD

MEMS devices and methods of forming thereof

MEMS devices and methods of forming thereof

AGENCY FOR SCIENCE TECHNOLOLGY

Fully salicided (FUCA) MOSFET structure

GLOBALFOUNDRIES SG PTE LTD

Piezoelectric MEMS devices and methods of forming thereof