Inventor
MERZ ERICH
DE12 patents
⚠️ This page may combine multiple inventors who share the name “MERZ ERICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
5 patentsUS7304717B2Dec 4, 2007
Imaging device in a projection exposure facility
ZEISS CARL SMT AG12 citations91
US7486382B2Feb 3, 2009
Imaging device in a projection exposure machine
ZEISS CARL SMT AG8 citations82
US7710542B2May 4, 2010
Imaging device in a projection exposure machine
ZEISS CARL SMT AG7 citations72
US7548387B2Jun 16, 2009
Optical imaging device
ZEISS CARL SMT AG4 citations60
US7768721B2Aug 3, 2010
Optical assembly, projection exposure apparatus and projection objective
ZEISS CARL SMT AG3 citations56
ZEISS STIFTUNG
3 patentsUS6307688B1Oct 23, 2001
Optical system, in particular projection-illumination unit used in microlithography
ZEISS STIFTUNG152 citations98
US6388823B1May 14, 2002
Optical system, especially a projection light facility for microlithography
ZEISS STIFTUNG126 citations96
US6191898B1Feb 20, 2001
Optical imaging device, particularly an objective, with at least one optical element
ZEISS STIFTUNG62 citations94