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Inventor
OOFUCHI SHINOBU
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “OOFUCHI SHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
1 patent
US7094133B2
Aug 22, 2006
Retainer and wafer polishing apparatus
TOSHIBA KK
25 citations
87
TOSHIBA CERAMICS CO
1 patent
US6976908B2
Dec 20, 2005
Polishing head and polishing apparatus
TOSHIBA CERAMICS CO
7 citations
69