Inventor

ROMERO PATRICIO E

US22 patents

⚠️ This page may combine multiple inventors who share the name “ROMERO PATRICIO E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ROMERO PATRICIO E

INTEL CORP

Scalable and high yield synthesis of transition metal bis-diazabutadienes

Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD)

Forming layers of materials over small regions by selective chemical reaction including limiting enchroachment of the layers over adjacent regions

Selective deposition utilizing sacrificial blocking layers for semiconductor devices

Conformal thin film deposition of electropositive metal alloy films

Scandium precursor for SC2O3 or SC2S3 atomic layer deposition

Selective gate spacers for semiconductor devices

Selective gate spacers for semiconductor devices

Process and material for preventing deleterious expansion of high aspect ratio copper filled through silicon vias (TSVs)

Scandium precursor for SC2O3 or SC2S3 atomic layer deposition

Scandium precursor for SC2O3 or SC2S3 atomic layer deposition

Selective gate spacers for semiconductor devices

Electropositive metal containing layers for semiconductor applications

Additives to improve the performance of a precursor source for cobalt deposition

Passivation layer for germanium substrate

Selective deposition utilizing sacrificial blocking layers for semiconductor devices

Inherently selective precursors for deposition of second or third row transition metal thin films

Transition metal dry etch by atomic layer removal of oxide layers for device fabrication

ROMERO PATRICIO E

Selective area deposition of metal films by atomic layer deposition (ALD) and chemical vapor deposition (CVD)

Selective area deposition of metal films by atomic layer deposition (ALD) and chemical vapor deposition (CVD)

Electropositive metal containing layers for semiconductor applications

BLACKWELL JAMES M

Method of forming a metal from a cobalt metal precursor