Inventor
CHANG SHIH-TZUNG
US14 patents
⚠️ This page may combine multiple inventors who share the name “CHANG SHIH-TZUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
9 patentsUS6828226B1Dec 7, 2004
Removal of SiON residue after CMP
TAIWAN SEMICONDUCTOR MFG24 citations90
US6531382B1Mar 11, 2003
Use of a capping layer to reduce particle evolution during sputter pre-clean procedures
TAIWAN SEMICONDUCTOR MFG16 citations83
US7026233B2Apr 11, 2006
Method for reducing defects in post passivation interconnect process
TAIWAN SEMICONDUCTOR MFG12 citations81
US6626741B2Sep 30, 2003
Method for improving thickness uniformity on a semiconductor wafer during chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG7 citations74
US6769959B2Aug 3, 2004
Method and system for slurry usage reduction in chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG7 citations72
US7199045B2Apr 3, 2007
Metal-filled openings for submicron devices and methods of manufacture thereof
TAIWAN SEMICONDUCTOR MFG6 citations63
US7128821B2Oct 31, 2006
Electropolishing method for removing particles from wafer surface
TAIWAN SEMICONDUCTOR MFG4 citations61
US7304728B2Dec 4, 2007
Test device and method for laser alignment calibration
TAIWAN SEMICONDUCTOR MFG3 citations60
US7528478B2May 5, 2009
Semiconductor devices having post passivation interconnections and a buffer layer
TAIWAN SEMICONDUCTOR MFG0 citations49