P

Inventor

LIN YU-KU

TW34 patents
⚠️ This page may combine multiple inventors who share the name “LIN YU-KU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

21 patents
US6099662AAug 8, 2000

Process for cleaning a semiconductor substrate after chemical-mechanical polishing

TAIWAN SEMICONDUCTOR MFG77 citations95
US6372645B1Apr 16, 2002

Methods to reduce metal bridges and line shorts in integrated circuits

TAIWAN SEMICONDUCTOR MFG22 citations92
US6531382B1Mar 11, 2003

Use of a capping layer to reduce particle evolution during sputter pre-clean procedures

TAIWAN SEMICONDUCTOR MFG16 citations83
US6551927B1Apr 22, 2003

CoSix process to improve junction leakage

TAIWAN SEMICONDUCTOR MFG13 citations81
US6626741B2Sep 30, 2003

Method for improving thickness uniformity on a semiconductor wafer during chemical mechanical polishing

TAIWAN SEMICONDUCTOR MFG7 citations74
US6248002B1Jun 19, 2001

Obtaining the better defect performance of the fuse CMP process by adding slurry polish on more soft pad after slurry polish

TAIWAN SEMICONDUCTOR MFG13 citations73
US6232043B1May 15, 2001

Rule to determine CMP polish time

TAIWAN SEMICONDUCTOR MFG9 citations73
US8815630B1Aug 26, 2014

Back side illumination (BSI) sensors, manufacturing methods thereof, and semiconductor device manufacturing methods

TAIWAN SEMICONDUCTOR MFG5 citations72
US6769959B2Aug 3, 2004

Method and system for slurry usage reduction in chemical mechanical polishing

TAIWAN SEMICONDUCTOR MFG7 citations72
US7955993B2Jun 7, 2011

Oxygen plasma reduction to eliminate precursor overflow in BPTEOS film deposition

TAIWAN SEMICONDUCTOR MFG2 citations62
US7368379B2May 6, 2008

Multi-layer interconnect structure for semiconductor devices

TAIWAN SEMICONDUCTOR MFG5 citations62
US6514673B2Feb 4, 2003

Rule to determine CMP polish time

TAIWAN SEMICONDUCTOR MFG4 citations62
US6352924B1Mar 5, 2002

Rework method for wafers that trigger WCVD backside alarm

TAIWAN SEMICONDUCTOR MFG5 citations62
US7128821B2Oct 31, 2006

Electropolishing method for removing particles from wafer surface

TAIWAN SEMICONDUCTOR MFG4 citations61
US7417321B2Aug 26, 2008

Via structure and process for forming the same

TAIWAN SEMICONDUCTOR MFG4 citations60
US7304728B2Dec 4, 2007

Test device and method for laser alignment calibration

TAIWAN SEMICONDUCTOR MFG3 citations60
US6863491B2Mar 8, 2005

Catch-pin water support for process chamber

TAIWAN SEMICONDUCTOR MFG4 citations59
US6695921B2Feb 24, 2004

Hoop support for semiconductor wafer

TAIWAN SEMICONDUCTOR MFG5 citations59
US6682605B2Jan 27, 2004

Apparatus and method for removing coating layers from alignment marks

TAIWAN SEMICONDUCTOR MFG4 citations57
US8642439B2Feb 4, 2014

Semiconductor device and method of formation

TAIWAN SEMICONDUCTOR MFG1 citations51
US7312149B2Dec 25, 2007

Copper plating of semiconductor devices using single intermediate low power immersion step

TAIWAN SEMICONDUCTOR MFG1 citations49

TAIWAN SEMICONDUCTOR MFG CO LTD

10 patents

CHEN KEI-WEI

1 patent

NIAN JUN-NAN

1 patent

CHANG SHIH-CHIEH

1 patent