Inventor

LIN SHIH-HO

TW25 patents

⚠️ This page may combine multiple inventors who share the name “LIN SHIH-HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIN SHIH-HO

TAIWAN SEMICONDUCTOR MFG CO LTD

Magnetic tunnel junction device and method of forming same

Post-CMP cleaning apparatus and method with brush self-cleaning function

Vacuum assembly for chemical mechanical polishing

Polishing process for forming semiconductor device structure

Vacuum assembly for chemical mechanical polishing

Magnetic tunnel junction device and method of forming same

Magnetic tunnel junction device and method of forming same

Article transporter in semiconductor fabrication

Chemical mechanical polishing apparatus and method

Method for forming semiconductor device structure

Chemical mechanical polishing method

Chemical mechanical polishing apparatus and method

Method for forming semiconductor device structure

Oxidation-free copper metallization process using in-situ baking

Article transferring method in semiconductor fabrication

Method for forming semiconductor device structure

Method and system for performing chemical mechanical polishing

TAIWAN SEMICONDUCTOR MFG

Current-leveling electroplating/electropolishing electrode

Electropolishing method for removing particles from wafer surface

Test device and method for laser alignment calibration

Copper plating of semiconductor devices using single intermediate low power immersion step

CHEN KEI-WEI

Method of forming barrier layer with reduced resistivity and improved reliability in copper damascene process

LO CHIH-WEI

Lane departure warning system

WANG YU-SHENG

Oxidation-free copper metallization process using in-situ baking

CHANG SHIH-CHIEH

Current-leveling electroplating/electropolishing electrode