Inventor
MATSUMURA TSUYOSHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MATSUMURA TSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
7 patentsUS7700490B2Apr 20, 2010
Semiconductor manufacturing method for removing residue generated by dry etching
TOSHIBA KK2 citations61
US7345352B2Mar 18, 2008
Insulating tube, semiconductor device employing the tube, and method of manufacturing the same
TOSHIBA KK3 citations60
US6995472B2Feb 7, 2006
Insulating tube
TOSHIBA KK1 citations60
US7850818B2Dec 14, 2010
Method of manufacturing semiconductor device and cleaning apparatus
TOSHIBA KK0 citations51
US7635601B2Dec 22, 2009
Method of manufacturing semiconductor device and cleaning apparatus
TOSHIBA KK1 citations51
US7282437B2Oct 16, 2007
Insulating tube, semiconductor device employing the tube, and method of manufacturing the same
TOSHIBA KK0 citations50
US7776754B2Aug 17, 2010
Semiconductor device manufacturing method and chemical fluid used for manufacturing semiconductor device
TOSHIBA KK0 citations40