Inventor
LIEBCHEN ARMIN
US5 patents
Patents
5 patentsUS6738859B2May 18, 2004
Method and apparatus for fast aerial image simulation
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US7116411B2Oct 3, 2006
Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems
ASML MASKTOOLS BV27 citations92
US7355673B2Apr 8, 2008
Method, program product and apparatus of simultaneous optimization for NA-Sigma exposure settings and scattering bars OPC using a device layout
ASML MASKTOOLS BV25 citations91
US7652758B2Jan 26, 2010
Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems
ASML MASKTOOLS BV11 citations83
US7034919B2Apr 25, 2006
Method and apparatus for providing lens aberration compensation by illumination source optimization
ASML MASKTOOLS BV5 citations60