Inventor
PARK GUI SU
KR13 patents
⚠️ This page may combine multiple inventors who share the name “PARK GUI SU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
12 patentsUS10283390B2May 7, 2019
Apparatus for processing substrate
SEMES CO LTD2 citations71
US10825699B2Nov 3, 2020
Standby port and substrate processing apparatus having the same
SEMES CO LTD2 citations69
US11794220B2Oct 24, 2023
Fluid supply unit and substrate treating apparatus having the same
SEMES CO LTD2 citations68
US11721575B2Aug 8, 2023
Substrate support unit and substrate treating apparatus having the same
SEMES CO LTD2 citations68
US11232942B2Jan 25, 2022
Substrate treating method and substrate treating apparatus
SEMES CO LTD2 citations68
US11765793B2Sep 19, 2023
Substrate treating apparatus
SEMES CO LTD2 citations66
US12593649B2Mar 31, 2026
Apparatus and method for treating substrate
SEMES CO LTD0 citations60
US12491532B2Dec 9, 2025
Apparatus and method for treating substrate
SEMES CO LTD0 citations60
US11594421B2Feb 28, 2023
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations59
US12278121B2Apr 15, 2025
Support unit, substrate treating apparatus including the same, and substrate treating method
SEMES CO LTD0 citations57
US12412767B2Sep 9, 2025
Apparatus for treating substrate and method for treating substrate
SEMES CO LTD0 citations50
US11869778B2Jan 9, 2024
Liquid supply unit, and apparatus and method for processing substrate
SEMES CO LTD0 citations46