Inventor

GOTO KINYA

JP17 patents

⚠️ This page may combine multiple inventors who share the name “GOTO KINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GOTO KINYA

MITSUBISHI ELECTRIC CORP

Method of manufacturing contact structure

Method for fabricating a dual damascene contact in an insulating film having density gradually varying in the thickness direction

Electronic device includes an insulating film having density or carbon concentration varying gradually in the direction of the thickness and a conductive film formed therein

Method of manufacturing semiconductor device and semiconductor device

Semiconductor device and method of manufacturing the same

Method of polishing a stack of dielectric layers including a fluorine containing silicon oxide layer

RENESAS TECH CORP

Semiconductor device with seal ring

Semiconductor element and MIM-type capacitor formed in different layers of a semiconductor device

Semiconductor device and method of fabricating the same

Semiconductor device and manufacturing method therefor

Method of manufacturing semiconductor device and semiconductor device

RENESAS ELECTRONICS CORP

Semiconductor chip with seal ring and sacrificial corner pattern

Semiconductor chip with seal ring and sacrificial corner pattern

Semiconductor device and method of fabricating the same

Semiconductor device and manufacturing method therefor

FURUSAWA TAKESHI

Semiconductor chip with seal ring and sacrificial corner pattern

OKA YOSHIHIRO

Semiconductor device