Inventor
SUNDBERG LINDA KARIN
US27 patents
⚠️ This page may combine multiple inventors who share the name “SUNDBERG LINDA KARIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
18 patentsUS7473749B2Jan 6, 2009
Preparation of topcoat compositions and methods of use thereof
IBM14 citations92
US7399581B2Jul 15, 2008
Photoresist topcoat for a photolithographic process
IBM14 citations92
US8003309B2Aug 23, 2011
Photoresist compositions and methods of use in high index immersion lithography
IBM10 citations84
US7288362B2Oct 30, 2007
Immersion topcoat materials with improved performance
IBM11 citations83
US7459183B2Dec 2, 2008
Method of forming low-K interlevel dielectric layers and structures
IBM7 citations74
US7358035B2Apr 15, 2008
Topcoat compositions and methods of use thereof
IBM6 citations74
US7521172B2Apr 21, 2009
Topcoat material and use thereof in immersion lithography processes
IBM7 citations70
US8053537B2Nov 8, 2011
Method for using a topcoat composition
IBM1 citations63
US8034532B2Oct 11, 2011
High contact angle topcoat material and use thereof in lithography process
IBM4 citations62
US7855045B2Dec 21, 2010
Immersion topcoat materials with improved performance
IBM2 citations61
US12110592B2Oct 8, 2024
Generating metal-oxide film
IBM0 citations57
US12099043B2Sep 24, 2024
Protective enclosure for gas sensors
IBM0 citations56
US11624740B2Apr 11, 2023
Protective enclosure for gas sensors
IBM0 citations56
US7931829B2Apr 26, 2011
Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures
IBM0 citations52
US7910290B2Mar 22, 2011
Photoresist topcoat for a photolithographic process
IBM0 citations52
US7820242B2Oct 26, 2010
Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures
IBM0 citations52
US7728089B2Jun 1, 2010
Topcoat compositions and methods of use thereof
IBM1 citations52
US7901868B2Mar 8, 2011
Photoresist topcoat for a photolithographic process
IBM0 citations46
ITO HIROSHI
4 patentsUS8088873B2Jan 3, 2012
Topcoat composition
ITO HIROSHI2 citations63
US9250529B2Feb 2, 2016
Photoresist compositions and methods of use in high index immersion lithography
ITO HIROSHI2 citations62
US8236482B2Aug 7, 2012
Photoresist compositions and methods of use in high index immersion lithography
ITO HIROSHI2 citations62
US8802357B2Aug 12, 2014
Method for using a topcoat composition
ITO HIROSHI0 citations52