Inventor

TAZAWA HISASHI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “TAZAWA HISASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

2 patents

US6405610B1Jun 18, 2002

Wafer inspection apparatus

NIKON CORP15 citations79

US7283200B2Oct 16, 2007

System and method for measuring displacement of a stage

NIKON CORP0 citations51

ASM JAPAN

1 patent

US7825040B1Nov 2, 2010

Method for depositing flowable material using alkoxysilane or aminosilane precursor

ASM JAPAN545 citations98

TORAY INDUSTRIES

1 patent

US5766720AJun 16, 1998

Impact vibration absorbers and devices that incorporated them

TORAY INDUSTRIES50 citations91

FUKAZAWA ATSUKI

1 patent

US8765233B2Jul 1, 2014

Method for forming low-carbon CVD film for filling trenches

FUKAZAWA ATSUKI2 citations59