Inventor

ONIZAWA SHIGEYUKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “ONIZAWA SHIGEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ONIZAWA SHIGEYUKI

1 patent

US8669185B2Mar 11, 2014

Method of tailoring conformality of Si-containing film

ONIZAWA SHIGEYUKI585 citations95

FUKAZAWA ATSUKI

1 patent

US8765233B2Jul 1, 2014

Method for forming low-carbon CVD film for filling trenches

FUKAZAWA ATSUKI2 citations59