Inventor
FLOCK KLAUS
US14 patents
⚠️ This page may combine multiple inventors who share the name “FLOCK KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS9310290B2Apr 12, 2016
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP18 citations90
US7889339B1Feb 15, 2011
Complementary waveplate rotating compensator ellipsometer
KLA TENCOR CORP27 citations88
US9506871B1Nov 29, 2016
Pulsed laser induced plasma light source
KLA TENCOR CORP18 citations83
US9116103B2Aug 25, 2015
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP7 citations82
US7889340B1Feb 15, 2011
Normal incidence ellipsometer with complementary waveplate rotating compensators
KLA TENCOR CORP9 citations79
US8873050B1Oct 28, 2014
Selective diffraction with in-series gratings
KLA TENCOR CORP6 citations72
US9217717B2Dec 22, 2015
Two dimensional optical detector with multiple shift registers
KLA TENCOR CORP2 citations61
US9857292B2Jan 2, 2018
Broadband and wide field angle compensator
KLA TENCOR CORP0 citations50
US9519093B2Dec 13, 2016
Broadband and wide field angle compensator
KLA TENCOR CORP1 citations50