Inventor
ROTTER LAWRENCE
US7 patents
⚠️ This page may combine multiple inventors who share the name “ROTTER LAWRENCE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS9310290B2Apr 12, 2016
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP18 citations90
US9116103B2Aug 25, 2015
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP7 citations82
US9857292B2Jan 2, 2018
Broadband and wide field angle compensator
KLA TENCOR CORP0 citations50
US9519093B2Dec 13, 2016
Broadband and wide field angle compensator
KLA TENCOR CORP1 citations50
THERMA WAVE INC
3 patentsUS7061614B2Jun 13, 2006
Measurement system with separate optimized beam paths
THERMA WAVE INC43 citations91
US7227637B2Jun 5, 2007
Measurement system with separate optimized beam paths
THERMA WAVE INC6 citations72
US7154607B2Dec 26, 2006
Flat spectrum illumination source for optical metrology
THERMA WAVE INC8 citations70