Inventor

DE VEER JOHANNES D

US12 patents

⚠️ This page may combine multiple inventors who share the name “DE VEER JOHANNES D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

6 patents

US9228943B2Jan 5, 2016

Dynamically adjustable semiconductor metrology system

KLA TENCOR CORP31 citations93

US8860937B1Oct 14, 2014

Metrology systems and methods for high aspect ratio and large lateral dimension structures

KLA TENCOR CORP35 citations93

US9310290B2Apr 12, 2016

Multiple angles of incidence semiconductor metrology systems and methods

KLA TENCOR CORP18 citations90

US9116103B2Aug 25, 2015

Multiple angles of incidence semiconductor metrology systems and methods

KLA TENCOR CORP7 citations82

US8797534B2Aug 5, 2014

Optical system polarizer calibration

KLA TENCOR CORP1 citations47

US10151631B2Dec 11, 2018

Spectroscopy with tailored spectral sampling

KLA TENCOR CORP0 citations38

KLA TENCOR TECH CORP

1 patent

US6999180B1Feb 14, 2006

Optical film topography and thickness measurement

KLA TENCOR TECH CORP84 citations97

WANG HAIMING

1 patent

US9404872B1Aug 2, 2016

Selectably configurable multiple mode spectroscopic ellipsometry

WANG HAIMING29 citations93

HILL ANDREW V

1 patent

US8896832B2Nov 25, 2014

Discrete polarization scatterometry

HILL ANDREW V25 citations90

KLA CORP

1 patent

US11309202B2Apr 19, 2022

Overlay metrology on bonded wafers

KLA CORP5 citations73

ZHUANG GUORONG V

1 patent

US9146156B2Sep 29, 2015

Light source tracking in optical metrology system

ZHUANG GUORONG V3 citations56

DE VEER JOHANNES D

1 patent

US8570514B2Oct 29, 2013

Optical system polarizer calibration

DE VEER JOHANNES D0 citations45