Inventor
BRADY GREGORY
US10 patents
⚠️ This page may combine multiple inventors who share the name “BRADY GREGORY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
8 patentsUS9310290B2Apr 12, 2016
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP18 citations90
US9400246B2Jul 26, 2016
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP5 citations83
US9116103B2Aug 25, 2015
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP7 citations82
US10976249B1Apr 13, 2021
Reflective pupil relay system
KLA TENCOR CORP3 citations72
US9255877B2Feb 9, 2016
Metrology system optimization for parameter tracking
KLA TENCOR CORP6 citations72
US8982358B2Mar 17, 2015
Apparatus and method of measuring roughness and other parameters of a structure
KLA TENCOR CORP2 citations62
US10969328B2Apr 6, 2021
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP0 citations61
US10215688B2Feb 26, 2019
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP0 citations51