Inventor
SHCHEGROV ANDREI
US12 patents
⚠️ This page may combine multiple inventors who share the name “SHCHEGROV ANDREI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS9243886B1Jan 26, 2016
Optical metrology of periodic targets in presence of multiple diffraction orders
KLA TENCOR CORP34 citations93
US8860937B1Oct 14, 2014
Metrology systems and methods for high aspect ratio and large lateral dimension structures
KLA TENCOR CORP35 citations93
US9310290B2Apr 12, 2016
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP18 citations90
US9116103B2Aug 25, 2015
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP7 citations82
US10943838B2Mar 9, 2021
Measurement of overlay error using device inspection system
KLA TENCOR CORP6 citations80
US11784097B2Oct 10, 2023
Measurement of overlay error using device inspection system
KLA TENCOR CORP0 citations58
SPECTRALUS CORP
4 patentsUS7570676B2Aug 4, 2009
Compact efficient and robust ultraviolet solid-state laser sources based on nonlinear frequency conversion in periodically poled materials
SPECTRALUS CORP50 citations94
US7742510B2Jun 22, 2010
Compact solid-state laser with nonlinear frequency conversion using periodically poled materials
SPECTRALUS CORP17 citations82
US7724797B2May 25, 2010
Solid-state laser arrays using nonlinear frequency conversion in periodically poled materials
SPECTRALUS CORP6 citations61
US8000357B2Aug 16, 2011
Compact, efficient and robust ultraviolet solid-state laser sources based on nonlinear frequency conversion in periodically poled materials
SPECTRALUS CORP1 citations51