Inventor
SUBBANNA MANJUNATH
IN7 patents
⚠️ This page may combine multiple inventors who share the name “SUBBANNA MANJUNATH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS12060651B2Aug 13, 2024
Chamber architecture for epitaxial deposition and advanced epitaxial film applications
APPLIED MATERIALS INC1 citations61
US12091749B2Sep 17, 2024
Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet
APPLIED MATERIALS INC1 citations60
US12584218B2Mar 24, 2026
Plate assemblies, process kits, and processing chambers for semiconductor manufacturing
APPLIED MATERIALS INC0 citations59
US12018372B2Jun 25, 2024
Gas injector for epitaxy and CVD chamber
APPLIED MATERIALS INC0 citations50
US12428731B2Sep 30, 2025
Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability
APPLIED MATERIALS INC0 citations49
US12467144B2Nov 11, 2025
Methods of correlating zones of processing chambers, and related systems and methods
APPLIED MATERIALS INC0 citations48