Inventor
MAKELA NEAL A
US4 patents
Patents
4 patentsUS9859403B1Jan 2, 2018
Multiple step thin film deposition method for high conformality
GLOBALFOUNDRIES INC4 citations71
US10014180B1Jul 3, 2018
Tungsten gate and method for forming
GLOBALFOUNDRIES INC0 citations50
US10483205B2Nov 19, 2019
Contact using multilayer liner
GLOBALFOUNDRIES INC0 citations49
US9960118B2May 1, 2018
Contact using multilayer liner
GLOBALFOUNDRIES INC1 citations49