Inventor
HAN KEE-YUN
KR7 patents
⚠️ This page may combine multiple inventors who share the name “HAN KEE-YUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LG SILTRON INC
4 patentsUS9358666B2Jun 7, 2016
Slurry supply device and polishing apparatus including the same
LG SILTRON INC0 citations49
US9744641B2Aug 29, 2017
Wafer polishing apparatus
LG SILTRON INC0 citations47
US9724800B2Aug 8, 2017
Wafer polishing apparatus
LG SILTRON INC1 citations43
US10255669B2Apr 9, 2019
Defect measuring device for wafers
LG SILTRON INC0 citations39
SK SILTRON CO LTD
3 patentsUS10062574B2Aug 28, 2018
Wafer polishing apparatus and method
SK SILTRON CO LTD2 citations70
US11389922B2Jul 19, 2022
Polishing measurement device and abrasion time controlling method thereof, and polishing control system including same
SK SILTRON CO LTD2 citations69
US12533873B2Jan 27, 2026
Device and method for separating wafers
SK SILTRON CO LTD0 citations53