Inventor
MORIOKA TOSHIHITO
JP8 patents
Patents
8 patentsUS11521881B2Dec 6, 2022
Substrate treating apparatus
SCREEN HOLDINGS CO LTD2 citations70
US11850623B2Dec 26, 2023
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD1 citations60
US11948823B2Apr 2, 2024
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations59
US12581911B2Mar 17, 2026
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US12496622B2Dec 16, 2025
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US12083563B2Sep 10, 2024
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations49
US10471479B2Nov 12, 2019
Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box
SCREEN HOLDINGS CO LTD0 citations38
US10141206B2Nov 27, 2018
Substrate processing apparatus and gap washing method
SCREEN HOLDINGS CO LTD0 citations36