Inventor
KOLESNYCHENKO ALEKSEY
NL22 patents
⚠️ This page may combine multiple inventors who share the name “KOLESNYCHENKO ALEKSEY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7394521B2Jul 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV160 citations99
US7388648B2Jun 17, 2008
Lithographic projection apparatus
ASML NETHERLANDS BV136 citations99
US6952253B2Oct 4, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1,825 citations99
US7372541B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV74 citations98
US7982850B2Jul 19, 2011
Immersion lithographic apparatus and device manufacturing method with gas supply
ASML NETHERLANDS BV14 citations93
US9817321B2Nov 14, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9684250B2Jun 20, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9465301B2Oct 11, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US10620545B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US7710541B2May 4, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations63
US10222706B2Mar 5, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
LOF JOERI
4 patentsUS8797503B2Aug 5, 2014
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure
LOF JOERI5 citations84
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
US8208120B2Jun 26, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52