Inventor
ABEL JOSEPH
US7 patents
Patents
7 patentsUS10269559B2Apr 23, 2019
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
LAM RES CORP28 citations93
US10727046B2Jul 28, 2020
Surface modified depth controlled deposition for plasma based deposition
LAM RES CORP2 citations72
US12049699B2Jul 30, 2024
Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching
LAM RES CORP0 citations62
US11293098B2Apr 5, 2022
Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching
LAM RES CORP1 citations62
US10978302B2Apr 13, 2021
Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film
LAM RES CORP0 citations62
US11373862B2Jun 28, 2022
Surface modified depth controlled deposition for plasma based deposition
LAM RES CORP1 citations61
US10636686B2Apr 28, 2020
Method monitoring chamber drift
LAM RES CORP0 citations40