Inventor

WOOD PHIL

DE2 patents

⚠️ This page may combine multiple inventors who share the name “WOOD PHIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

1 patent

US6810105B2Oct 26, 2004

Methods and apparatus for dishing and erosion characterization

KLA TENCOR TECH CORP53 citations91

MAX PLANCK GESELLSCHAFT

1 patent

US11384132B2Jul 12, 2022

Mutant light-inducible ion channel of chrimson

MAX PLANCK GESELLSCHAFT0 citations43