Inventor
BREILING PATRICK G
US6 patents
⚠️ This page may combine multiple inventors who share the name “BREILING PATRICK G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS11837443B2Dec 5, 2023
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
LAM RES CORP1 citations69
US10984987B2Apr 20, 2021
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
LAM RES CORP4 citations69
US11515124B2Nov 29, 2022
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
LAM RES CORP0 citations59
US12142509B2Nov 12, 2024
Electrostatic chuck with seal surface
LAM RES CORP0 citations50