Inventor
KAMP DAVID WILLIAM
US3 patents
Patents
3 patentsUS11837443B2Dec 5, 2023
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
LAM RES CORP1 citations69
US10984987B2Apr 20, 2021
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
LAM RES CORP4 citations69
US11515124B2Nov 29, 2022
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
LAM RES CORP0 citations59