Inventor
GARCIA DE GORORDO ALVARO
US10 patents
Patents
10 patentsUS11087989B1Aug 10, 2021
Cryogenic atomic layer etch with noble gases
APPLIED MATERIALS INC8 citations83
US11764041B2Sep 19, 2023
Adjustable thermal break in a substrate support
APPLIED MATERIALS INC4 citations72
US11646183B2May 9, 2023
Substrate support assembly with arc resistant coolant conduit
APPLIED MATERIALS INC4 citations72
US11515166B2Nov 29, 2022
Cryogenic atomic layer etch with noble gases
APPLIED MATERIALS INC2 citations72
US11996294B2May 28, 2024
Cryogenic atomic layer etch with noble gases
APPLIED MATERIALS INC0 citations62
US9257265B2Feb 9, 2016
Methods for reducing etch nonuniformity in the presence of a weak magnetic field in an inductively coupled plasma reactor
APPLIED MATERIALS INC2 citations61
US12397330B2Aug 26, 2025
Condition selectable backside gas
APPLIED MATERIALS INC0 citations60
US11666952B2Jun 6, 2023
Condition selectable backside gas
APPLIED MATERIALS INC1 citations60
US10656029B2May 19, 2020
Processing system having optical temperature measurement subsystem
APPLIED MATERIALS INC1 citations60
US12334315B2Jun 17, 2025
Cooled substrate support assembly for radio frequency environments
APPLIED MATERIALS INC0 citations50