Inventor
PROUTY STEPHEN DONALD
US9 patents
Patents
9 patentsUS11764041B2Sep 19, 2023
Adjustable thermal break in a substrate support
APPLIED MATERIALS INC4 citations72
US11646183B2May 9, 2023
Substrate support assembly with arc resistant coolant conduit
APPLIED MATERIALS INC4 citations72
US11569114B2Jan 31, 2023
Semiconductor processing with cooled electrostatic chuck
APPLIED MATERIALS INC2 citations71
US11380572B2Jul 5, 2022
Substrate support carrier with improved bond layer protection
APPLIED MATERIALS INC4 citations71
US11373893B2Jun 28, 2022
Cryogenic electrostatic chuck
APPLIED MATERIALS INC3 citations69
US11651987B2May 16, 2023
Substrate support carrier with improved bond layer protection
APPLIED MATERIALS INC0 citations61
US11437261B2Sep 6, 2022
Cryogenic electrostatic chuck
APPLIED MATERIALS INC0 citations59
US12444585B2Oct 14, 2025
Electrical connector for cooled substrate support assembly
APPLIED MATERIALS INC1 citations58
US12334315B2Jun 17, 2025
Cooled substrate support assembly for radio frequency environments
APPLIED MATERIALS INC0 citations50