Inventor
NOUJAIM ANDREW ANTOINE
US7 patents
Patents
7 patentsUS11764041B2Sep 19, 2023
Adjustable thermal break in a substrate support
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Substrate support assembly with arc resistant coolant conduit
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US11569114B2Jan 31, 2023
Semiconductor processing with cooled electrostatic chuck
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Cryogenic electrostatic chuck
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US11437261B2Sep 6, 2022
Cryogenic electrostatic chuck
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US12444585B2Oct 14, 2025
Electrical connector for cooled substrate support assembly
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US12334315B2Jun 17, 2025
Cooled substrate support assembly for radio frequency environments
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