Inventor
GUO JIANQIU
US6 patents
Patents
6 patentsUS12463093B2Nov 4, 2025
Method of tuning film properties of metal nitride using plasma
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US12100595B2Sep 24, 2024
Amorphous silicon-based scavenging and sealing EOT
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US11646226B2May 9, 2023
Method of tuning film properties of metal nitride using plasma
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US10991586B2Apr 27, 2021
In-situ tungsten deposition without barrier layer
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US12410513B2Sep 9, 2025
Seamless gapfill of metal nitrides
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US12588443B2Mar 24, 2026
Methods for forming low resistivity contacts
APPLIED MATERIALS INC0 citations48