Inventor
DAN ARKAPRAVA
US12 patents
Patents
12 patentsUS11220747B2Jan 11, 2022
Complementary pattern station designs
APPLIED MATERIALS INC2 citations72
US12305283B2May 20, 2025
Dithering or dynamic offsets for improved uniformity
APPLIED MATERIALS INC0 citations62
US12077861B2Sep 3, 2024
Dithering or dynamic offsets for improved uniformity
APPLIED MATERIALS INC0 citations62
US12463093B2Nov 4, 2025
Method of tuning film properties of metal nitride using plasma
APPLIED MATERIALS INC0 citations61
US11646226B2May 9, 2023
Method of tuning film properties of metal nitride using plasma
APPLIED MATERIALS INC0 citations61
US11623253B2Apr 11, 2023
In-situ DC plasma for cleaning pedestal heater
APPLIED MATERIALS INC0 citations61
US11260432B2Mar 1, 2022
In-situ DC plasma for cleaning pedestal heater
APPLIED MATERIALS INC0 citations61
US11823870B2Nov 21, 2023
PEALD titanium nitride with direct microwave plasma
APPLIED MATERIALS INC0 citations59
US11599069B1Mar 7, 2023
Method for auto-tuning and process performance assessment of chamber control
APPLIED MATERIALS INC0 citations59
US11791190B2Oct 17, 2023
Apparatus and methods for real-time wafer chucking detection
APPLIED MATERIALS INC0 citations58
US12469739B2Nov 11, 2025
Methods of operating a spatial deposition tool
APPLIED MATERIALS INC0 citations51
US11791172B2Oct 17, 2023
Methods of controlling gas pressure in gas-pulsing-based precursor distribution systems
APPLIED MATERIALS INC0 citations48