Inventor
BLAHNIK JEFFREY C
US11 patents
⚠️ This page may combine multiple inventors who share the name “BLAHNIK JEFFREY C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
5 patentsUS8662812B2Mar 4, 2014
Load lock fast pump vent
BROOKS AUTOMATION INC13 citations82
US10854478B2Dec 1, 2020
Load lock fast pump vent
BROOKS AUTOMATION INC2 citations71
US11610787B2Mar 21, 2023
Load lock fast pump vent
BROOKS AUTOMATION INC0 citations61
US9478446B2Oct 25, 2016
Load lock chamber
BROOKS AUTOMATION INC2 citations61
US10541157B2Jan 21, 2020
Load lock fast pump vent
BROOKS AUTOMATION INC0 citations49
APPLIED MATERIALS INC
3 patentsUS10256125B2Apr 9, 2019
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
APPLIED MATERIALS INC14 citations93
US9378994B2Jun 28, 2016
Multi-position batch load lock apparatus and systems and methods including same
APPLIED MATERIALS INC19 citations92
US10586720B2Mar 10, 2020
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
APPLIED MATERIALS INC12 citations85